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課程名稱 |
電子束技術實習
Lab on E-beam Technology |
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開課學期 |
111-1 |
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授課對象 |
學程 奈米科技學程 |
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授課教師 |
管傑雄 |
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課號 |
EEE5038 |
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課程識別碼 |
943 U0400 |
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班次 |
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學分 |
1.0 |
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全/半年 |
半年 |
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必/選修 |
選修 |
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上課時間 |
星期三6(13:20~14:10) |
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上課地點 |
電二146 |
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備註 |
總人數上限：20人 |
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課程簡介影片 |
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核心能力關聯 |
核心能力與課程規劃關聯圖 |
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課程大綱
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課程概述 |
THE COURSE INCLUDE EBEAM TECHNOLOGY STUDY AND TRAINING
1.TRAINING ON SEM:
UTILIZE SEM TO OBSERVE THE NANO-STRUCTURE ON THE SURFACE. THE ACCELERATION VOLTAGE IS FROM 500V TO 30KV.
2.TRAINING ON E-BEAM LITHOGRAPHY:
UTILIZE E-BEAM LITHOGRAPHY TO FABRICATE THE NANO-STRUCTURE. THE ACCELERATION VOLTAGES ARE 50KV AND 100KV.
3.TRAINING ON DUAL BEAM FOCUS ION BEAM:
UTILIZE DUAL BEAM FOCUS ION BEAM TO ETCH THE SAMPLE AND OBSERVE IT BY ELECTRON BEAM AT THE SAME TIME. FURTHERMORE, IT INCLUDE THE DEPOSITION SYSTEM, LOW TEMPERATURE AND FABRICATE THE SAMPLE FOR TEM.
4. STUDY THE PARAMETERS OF E-BEAM LITHOGRAPHY ON DIFFERENT SUBSTRATES AND THE ISSUES OF FOLLOWING SEMICONDUCTOR PROCESS.
5. STUDY THE APPLICATIONS OF E-BEAM LITHOGRAPHY IN DIFFERENT RESEARCH AREAS, INCLUDING ELECTRONICS, PHOTONICS, OPTOELECTRONICS, BIOMEDICAL ELECTRONICS, AND MICRO MECHANICAL SYSTEMS.
6. FOCUS ON THE DISCUSSION OF STUDENTS’ RESEARCH TOPICS UNDER THEIR ORIGINAL ADVISORS.
7. FOR THE SPECICAL TOPIC, DISCUSS THE RELATED INFORMATION AND INVITE FAMOUS INTERNATIONAL SCHOLARS TO GIVE SPEECHES AND ADVICES. |
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課程目標 |
NANOTECHNOLOGY PLAYS A SIGNIFICANT RULE IN DIFFERENT RESEARCH AREA (INCLUDING ELECTRONICS, PHOTONICS, OPTOELECTRONICS, BIOMEDICAL ELECTRONICS, AND MICRO MECHANICAL SYSTEMS). THE MOST IMPORTANT PART IS THE NANOSTRUCTURE FABRICATED BY E-BEAM LITHOGRAPHY TECHNOLOGY HAS POTENTIAL IN FURTHER RESEARCH AND DEVELOPMENT. THIS COURSE CONTAINS THE ADVANCED E-BEAM LITHOGRAPHY TECHNOLOGY AND FACILITIES, PROVIDES STUDENTS COMPLETE TRAINING FOR CROSS DISCIPLINARY APPLICATION, AND EXTENDS THEIR UNDERSTANDING AND PROFICIENCY ABOUT E-BEAM LITHOGRAPHY TECHNOLOGY |
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課程要求 |
BECAUSE OF THE HIGH PRICE OF MAINTENANCE AND CONSUMABLES, THE STUDENTS WHO WANT TO TAKE THE COURSE NEED THEIR ADVISOR’S PERMISSION AND FUNDING. |
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預期每週課後學習時數 |
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Office Hours |
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指定閱讀 |
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參考書目 |
TEXTBOOK: 1.HANDBOOK OF MICROLITHOGRAPHY, MICROMACHINING AND MICROFABRICATION
2.MONOGRAPHS IN PRACTICAL ELECTRON MICROSCOPY IN MATERIALS SCIENCE
3.ELECTRON-BEAM TECHNOLOGY IN MICROELECTRONIC FABRICATION
4.HANDBOOK OF VLSI MICROLITHOGRAPHY
5.NANOLITHOGRAPHY: A BORDERLAND BETWEEN STM, EB, IB, AND X-RAY LITHOGRAPHIES
REFERENCE: E-BEAM,SEM, USER MANUALS |
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評量方式
(僅供參考) |
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